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產(chǎn)品名稱: 日本YAMATO低溫等離子灰化機
產(chǎn)品型號: PR300/301 Low
產(chǎn)品展商: 其它品牌
產(chǎn)品文檔: 無相關文檔
簡單介紹
日本YAMATO低溫等離子灰化機 PR300/301 本產(chǎn)品是用等離子來進行表面處理的專業(yè)裝置。桌臺式，具有高性能，力求操作簡便，快捷，可顯示數(shù)據(jù)。廣泛應用于以電子材料為中心的各個行業(yè)中。用途:用于CSP、BGA、COB、基板的等離子處理。消除有機膜，金屬氧化膜。用于印刷電路板的干式清洗。界面活性處理。
日本YAMATO低溫等離子灰化機
的詳細介紹
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Model
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300
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301
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Method
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Barrel type of DP
DP : direct plasma
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High-frequency Output
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Max.300W
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Oscillating Frequency
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13.56MHz
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Reaction Chamber
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ø64×160mm
3 chambers
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ø118×160mm
1 chamber
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The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work.（PR300型等離子灰化機是一種廣泛應用于半導體分析工作上的氣體等離子裝置。） It boasts outstanding operability and safety,（有著十分突出的可操作性和**性） with an automatic tuning system as a standard component and other features. It has a compact design（小型化設計）, with a small-size HF generator and an oscillation section integrated with a portion of the chamber,（配有小型高頻發(fā)生器和振蕩部件的綜合性工作室） allowing it to be installed into a 19-inch rack.（允許放置19英寸支架）
- Three 64mm diameter chambers are included. (PR300)
- The unit can be set for a wide range of output conditions to handle a variety of testing samples.
- One 118mm diameter large chamber is accommodated.
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The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc.
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 Operation Flowchart |
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| Piping System Diagram (PR300) |
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Specifications
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Model
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PR300
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PR301
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Method
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Barrel type of direct plasma
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Control part
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High frequency output
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300W variable (100W×3 chambers)
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Oscillating frequency
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13.56 MHz
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Output impedance
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50Ω
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Tuning method
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Manual biaxial tuning method
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Instrument
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Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
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Timer
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0.1sec. to 999h
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Gas inlet
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1/4" stainless steel
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Power source (50/60Hz)
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AC 100/220V, single phase, 1 kVA
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Reaction part
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Reaction chamber
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Made of super hard glass, ø64×160mm×3 chanbers
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Made of pyrex glass, ø118×160mm
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Electrode structure
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Condenser type, 2-way split
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Control system
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Auto pressure reduction, auto leak valve
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Piping material
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Stailess steel, Teflon, Copper and Brass
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Stainless steel, Teflon
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External dimensions(W×D×Hmm)
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438×520×556
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438×520×656
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Weight
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Approx. 38kg
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Approx. kg
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Standard Accessories
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- Vacuum grease :1 container
- O-ring for reaction chamber :6 pcs.
- Sample dish (large and small) :each 4sets
- Lid for reaction chamber :4 sets
- Adapter for ground :1 pc.
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Optional Accessories
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Sample dish (large) Sample dish (small) Sample shelf Stand
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